Comparison of CrAlN layers obtained with one (CrAl) or two targets (Cr and Al) by magnetron sputtering

► CrAlN layers obtained with a (Cr75Al25) target or Cr and Al independent targets. ► Lower friction coefficient and better crystallinity obtained with a sintered target. ► Al content of layers obtained with a sintered target limited and fixed. ► Better tribological properties of layers obtained with two targets. ► No economical, practical and scientific interest to work with a sintered target.