Comparison of stress migration and electromigration in the fabrication of thin Al wires

► Thin Al wires fabricated by stress migration or electromigration. ► Similar Al2O3/Al/SiO2/Si structures were used for the preparation of thin Al wires. ► Comparison between stress migration and electromigration wire growth mechanism. ► Al thin wires also formed with a thin SiO2 layer replacing the native Al oxide layer. ► Potential for fabricating Al wires with controlled diameter using atomic migration.