Capacitance-voltage and leakage-current characteristics of sol-gel-derived crystalline and amorphous SrTa2O6 thin films

► Sol-gel derived SrTa2O6(STA) thin films showed high dielectric constants of 26-110. ► Crystalline and amorphous STA thin films showed different leakage current mechanisms. ► Dipolar relaxation caused capacitance change in the crystalline STA thin film. ► Amorphous STA thin films showed better capacitance stability. ► Electrode polarization contributed to the capacitance stability.