کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10670639 | 1008976 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication of biaxially textured magnesium oxide thin films by ion-beam-assisted deposition
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Biaxially textured MgO thin films were grown by ion-beam-assisted deposition. The film growth parameters of film thickness, ion-to-atom arrival ratio (r-value), ion beam angle, and ion beam voltage were studied. Film characterization was performed by X-ray diffraction, pole figure analysis, and atomic force microscopy (AFM). Full-width half-maximum (FWHM) of MgO (220) Ï-scans and MgO (002) Ï-scans, respectively, were used to evaluate in-plane and out-of-plane film texture. MgO (220) Ï-scan FWHM of 3.2° and MgO (002) Ï-scan FWHM of 1.2° was achieved on amorphous Si3N4-coated Si substrates using a 1500-V ion source oriented at 45° to the substrate normal and an r-value of 0.90. Depositions on metallic substrates yielded MgO (220) Ï-scan FWHM values of 5.2° and MgO (002) Ï-scan FWHM of 2.5°. Root-mean-square surface roughness of these films as measured by AFM was â2.3 nm.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 476, Issue 1, 1 April 2005, Pages 79-83
Journal: Thin Solid Films - Volume 476, Issue 1, 1 April 2005, Pages 79-83
نویسندگان
T.P. Weber, B. Ma, U. Balachandran, M. McNallan,