کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10670678 1009001 2005 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Vibrating capacitor method in the development of semiconductor gas sensors
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Vibrating capacitor method in the development of semiconductor gas sensors
چکیده انگلیسی
Adsorption usually results in work function shifts on catalytically active surfaces such as semiconductor gas sensors. The purpose of the present article is to summarise the capabilities of the vibrating capacitor from the simplest adsorption-induced work function tests to the scanning, vibrating, capacitor-yielded olfactory pictures and other chemical pictures. After a brief history and review of theoretical bases, the latest results will be discussed in detail. Olfactory pictures from semiconductor surfaces give a new chance to improve the selectivity of gas analysis. Chemical pictures from thin SnO2 layers produced by atomic layer epitaxy reveal the inhomogeneities of the technology. CPD maps taken from Pd nanolayer (activator)-covered surfaces help to find the best layer-depositing parameters for the activation process of the thin semiconductor gas sensor films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 490, Issue 1, 21 October 2005, Pages 17-21
نویسندگان
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