کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1448518 988676 2008 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
On-chip test structure suite for free-standing metal film mechanical property testing, Part I – Analysis
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
On-chip test structure suite for free-standing metal film mechanical property testing, Part I – Analysis
چکیده انگلیسی

We propose and analyze a notched free-standing thin-film structure subject to a well-defined stress concentration in pure tension for in situ mechanical testing of thin metal films. Load is applied electrostatically, making testing and handling routine and simple. The sensitivity of the notched structure to geometry, residual stress and to electrostatic instability are modeled and discussed. It is found that significant plastic straining can occur in the notch region before electrostatic instability. Coupled with adjacent cantilevers and fixed–fixed beams, this small area test structure suite enables a platform for evaluating linear properties such as Young’s modulus and residual stress, and gaining information on inelastic properties such as plasticity and fatigue. The total area of the suite is much smaller than that of a typical chip, allowing for the possibility that these devices can serve as diagnostic test structures.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Acta Materialia - Volume 56, Issue 14, August 2008, Pages 3344–3352
نویسندگان
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