کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1663740 1517994 2016 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Sn-inserted Al-induced layer exchange for large-grained GeSn thin films on insulator
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Sn-inserted Al-induced layer exchange for large-grained GeSn thin films on insulator
چکیده انگلیسی
Large-grained polycrystalline GeSn layers on glass are achieved through the layer exchange between a-Ge and Sn-doped Al layers. The thicker Sn layers, inserted below Al layers, provided the faster growth velocity, resulting in the smaller grain size of the GeSn layer. Controlling the Sn thickness (10 nm) and the growth temperature (300 °C) allowed for approximately 80% (111)-oriented GeSn layer with grains having an average size of 40 μm. The lower growth temperature led to the higher Sn content in GeSn: 300 °C resulted in a Sn content of 2%. These findings are meaningful to researches related to GeSn on insulators for fabricating advanced electrical and optical devices on inexpensive substrates as well as on Si platforms.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 616, 1 October 2016, Pages 316-319
نویسندگان
, , , ,