کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1663905 1517997 2016 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Initial estimation of thin film thickness measurement based on white light spectral interferometry
ترجمه فارسی عنوان
برآورد اولیه اندازه گیری ضخامت فیلم بر اساس تلسکوپ تلسکوپی نور سفید
کلمات کلیدی
ضخامت فیلم نازک، تداخل سنجی طیفی حل شده، برآورد اولیه، حداقل مربعات غیر خطی
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
چکیده انگلیسی


• The frequency of the nonlinear phase and overall visibility of the signal were applied.
• Both of methods were verified by the simulation and experiments.
• Both of the methods gave better results in shorter time than two commonly used global algorithms.

White-light interferometry has been extended into the spectral domain for many years. The authors discuss a white light spectral interferometer using a Michelson interferometric objective and spectrometer to measure the film thickness and propose two methods for initial estimation which are based on the frequency of the nonlinear phase and the overall visibility of the spectral signal. Both of the methods are capable of obtaining good, rapid, initial estimates in these measurements: our proposed methods are quicker than the commonly used global algorithms (simulated annealing algorithm and genetic algorithm). In terms of the speed and precision, the proposed methods are suited to in-line, high-speed measurement. In general, when the film thickness is more than 1 μm, it is better to use the method based on the nonlinear phase to estimate the initial value, and when the film thickness is < 1 μm, the method based on overall visibility is more applicable.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 612, 1 August 2016, Pages 267–273
نویسندگان
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