Two step technology for porous ZnO nanosystem formation for potential use in hydrogen gas sensors

The aim of the work was to develop a technology for porous ZnO nanosystems formation and to determine the relationship between their morphology and sensor properties to hydrogen. With this purpose, a two step technology has been used. On the first stage, porous Zn layers with different morphologies have been synthesized under near-equilibrium condensation conditions implemented by means of an accumulating systems plasma-condensate developed by us. On the second stage, the layers have been oxidized in pure oxygen atmosphere. The sensor tests performed at 250 °С have shown that sensitivity of the porous layers was more than 50% at hydrogen concentration 3000 ppm in dry air.