Investigation on influence of deposition rate of YBa2Cu3O7 − δ superconducting film prepared on Hastelloy C276 substrate by spray atomizing and coprecipitating laser chemical vapor deposition

• Effects of deposition rate of YBa2Cu3O7 − δ (YBCO) film were investigated.
• YBCO films were prepared on Hastelloy C276 by laser chemical vapor deposition.
• Deposition rates varied between 10 and 55 μm h− 1.
• High deposition rate favored growth of a-axis-oriented grains.
• Growth of the a-axis-oriented grains decreased YBCO film's electrical performance.

YBa2Cu3O7 − δ (YBCO) films were prepared at deposition rates ranging from 10 to 55μm h−1 on CeO2/LaMnO3/MgO/Gd2Zr2O7/Hastelloy C276 substrate by spray atomizing and coprecipitating laser chemical vapor deposition. At a deposition rate of 10 μm h−1, a c-axis-oriented YBCO film with a high critical temperature (TC) of 91 K and critical current density (JC) of 2.4 MA cm−2 was prepared, which showed an epitaxial growth mode of YBCO [001]//CeO2 [100] (YBCO [100]//CeO2 [011]). The full width at half maximum (FWHM) of the ω-scan and that of the φ-scan of the YBCO film were 1.9° and 3.2°, respectively. At a deposition rate of 45 μm h−1, an a-axis-oriented YBCO film with a TC of 78 K and a JC of 0.4 MAcm−2 was obtained. The YBCO film showed an epitaxial growth mode of YBCO [100]//CeO2 [100] (YBCO [001]//CeO2 [011]) and had the FWHM of 4.9° for the ω-scan and that of 9.5° for the φ-scan, respectively.