SiNx nanopillars on AlGaInP-based light-emitting diodes to enhance light extraction using self-assembly ZnO nanomask coating by successive ionic layer adsorption and reaction method

• SiNx nanopillars on the surfaces of AlInGaP-based light-emitting diodes
• ZnO nanoparticles used as a self-assembly dry etching mask over a SiNx film
• SiNx nanopillars provided a 33.7% increase in light output power.

This study presents a cost-effective method of producing SiNx nanopillars on the surfaces of AlInGaP-based light-emitting diodes (LEDs) to enhance light extraction using successive ionic layer adsorption and reaction (SILAR). The SILAR-coated ZnO nanoparticles were used as a self-assembly dry etching mask over a SiNx film during inductively coupled plasma etching. The proposed method provides a control on the density of ZnO nanoparticles. Optimizing the SiNx nanopillars on the surface of AlInGaP-based LEDs provided a 33.7% increase in light output power, compared to an ordinary flat surface LED, without a significant degradation in electrical properties. The increase in performance can be attributed to a reduction in Fresnel reflection and increased scattering by the addition of SiNx nanopillars across the emission surface of AlInGaP LEDs.