Transparent anatase and rutile TiO2 films grown by laser chemical vapor deposition

• (001) anatase, (101) anatase and (110) rutile TiO2 films were grown by laser CVD.
• TEM revealed that TiO2 films were grown as a single crystal.
• A transmittance of 98% at 800 nm was observed for (001) anatase TiO2 film.

Transparent single-crystal TiO2 films were grown on (001) SrTiO3 substrate by laser chemical vapor deposition. (001) anatase, (101) anatase, and (110) rutile TiO2 films were epitaxially grown at 1230, 1448, and 1500 K, respectively. The in-plane epitaxial orientation relations were [100] anatase TiO2//[100] SrTiO3 in the (001) anatase TiO2//(001) SrTiO3 film, [010] anatase TiO2//[100] SrTiO3 in the (101) anatase TiO2//(001) SrTiO3 film, and [001] rutile TiO2//[100] SrTiO3 in the (110) rutile//(001) SrTiO3 film. The TiO2 films were highly transparent at the visible to near-infrared range. A high transmittance of 98% was observed for the (001) anatase TiO2 film at a wavelength of 800 nm.