M-line spectroscopic, spectroscopic ellipsometric and microscopic measurements of optical waveguides fabricated by MeV-energy N+ ion irradiation for telecom applications

Irradiation with N+ ions of the 1.5–3.5 MeV energy range was applied to optical waveguide formation. Planar and channel waveguides have been fabricated in an Er-doped tungsten–tellurite glass, and in both types of bismuth germanate (BGO) crystals: Bi4Ge3O12 (eulytine) and Bi12GeO20 (sillenite). Multi-wavelength m-line spectroscopy and spectroscopic ellipsometry were used for the characterisation of the ion beam irradiated waveguides. Planar waveguides fabricated in the Er-doped tungsten–tellurite glass using irradiation with N+ ions at 3.5 MeV worked even at the 1550 nm telecommunication wavelength. 3.5 MeV N+ ion irradiated planar waveguides in eulytine-type BGO worked up to 1550 nm and those in sillenite-type BGO worked up to 1330 nm.

► Waveguides were fabricated in glass and crystals using MeV energy N+ ions.
► SRIM simulation and spectroscopic ellipsometry yielded similar waveguide structures.
► Multi-wavelength m-line spectroscopy was used to study the waveguides.
► Waveguides fabricated in an Er-doped tungsten–tellurite glass worked up to 1.5 μm.
► Waveguides in Bi12GeO20 remained operative up to 1.5 μm.