Determination of small tilt angles of short GaSb nanopillars using UV-visible Mueller matrix ellipsometry

► Mueller Matrix Ellipsometry used to detect small tilt angles of GaSb nanopillars ► Modeled as a graded anisotropic Bruggeman effective medium ► Two different gradient profiles; linear in diameter and linear in fill factor ► The off-diagonal elements allow for high sensitivity to the in plane anisotropies