کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1666133 | 1518066 | 2013 | 10 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Influence of Al content on the phase formation, growth stress and mechanical properties of TiZrAlN coatings Influence of Al content on the phase formation, growth stress and mechanical properties of TiZrAlN coatings](/preview/png/1666133.png)
Quaternary (Ti,Zr)1 − xAlxN transition metal nitride films, with Al content x ranging from 0 to 0.37, were reactively sputter-deposited from individual metallic targets under Ar + N2 plasma discharges on Si substrates at Ts = 270 °C. The influence of Al addition on the crystal structure, phase formation, growth morphology and intrinsic stress development, electrical and mechanical properties was systematically investigated. Three distinct compositional regions were evidenced: i) for 0 ≤ x ≤ 0.07, films develop a columnar structure consisting of cubic TiZr(Al)N grains with (111) and (200) preferred orientation, large compressive stresses up to ~− 4 GPa and hardness increase from ~ 20 to ~ 24 GPa, ii) for 0.09 ≤ x ≤ 0.16, Al incorporation favors the growth of nanocomposite films consisting of (200)-oriented cubic TiZr(Al)N nanocrystals surrounded by a highly-disordered matrix, accompanied by a decrease of compressive stress, whereas a maximum hardness H ~ 27 GPa and H/E ratio of 0.105 is reached at x ~ 0.12 and x = 0.14, respectively, and iii) x > 0.16, XRD amorphous films are formed, with reduced mechanical properties. The structure–stress-properties relationship is discussed based on evolutionary growth regimes induced by incorporating a high-mobility metal in a refractory compound lattice.
► Quaternary (Ti,Zr)1 − xAlxN magnetron sputtered films are studied up to x = 0.37.
► Drastic change in structure is revealed depending on compositional range.
► Al addition inhibits TiZrN grain growth and favors a (200) preferred orientation.
► In situ stress measurements reveal a non-monotonous Al content dependency.
► A maximum hardness value of H = 27 GPa is obtained at x ~ 0.12 (nanocomposite region).
Journal: Thin Solid Films - Volume 538, 1 July 2013, Pages 32–41