Effect of cation non-stoichiometry and crystallinity on the ionic conductivity of atomic layer deposited Y:BaZrO3 films

• Atomic layer deposition (ALD) of yttrium barium zirconate thin films.
• Controlled ALD process for various cation concentrations.
• Proton conducting ceramic electrolyte.
• Controlling the degree of crystallinity of yttrium doped barium zirconate ALD thin films.
• Electrochemical impedance spectroscopy for proton conductivity characterization.

The effects of A-site non-stoichiometry and crystallinity on the proton conductivity of anhydrous proton conducting yttria-doped barium zirconate (BYZ) thin film were investigated. The membranes were fabricated by atomic layer deposition (ALD) as it allows tailoring and varying the concentration of barium. Electrochemical impedance spectroscopy was conducted to investigate the ionic conductivity according to the stoichiometry and crystallinity of the ALD BYZ thin films.