Fabrication of Ce0.8Gd0.2O2 − δ thin-film oxygen transport membranes by reactive magnetron sputtering

► Magnetron sputtered gas-tight films of Ce0.8Gd0.2O2 achieved on porous substrates ► A 4-zone model is derived based on bias power and substrate sintering temperature. ► Different microstructures of films deposited are achieved using bias assistance. ► Structural analysis of films deposited is provided.