Determination of the dominant diffusing species during nickel and palladium germanide formation

► Metal markers are used to determine the diffusing species in Ni and Pd germanides. ► Ni is the dominant diffusing species by far during Ni5Ge3 and NiGe formation. ► Pd diffusion contributes around 60% towards Pd2Ge formation. ► Pd diffusion contributes around 65% towards PdGe formation.