Reactively co-sputter deposited a-C:H/Cr thin films: Material characteristics and optical properties

Various chromium-containing amorphous hydrogenated carbon (a-C:H/Cr) coatings were deposited on oxygen-free copper and silicon substrates for use as solar selective absorber coatings. The deposition was performed using a magnetron co-sputter deposition method under various methane/Ar ratios, ranging from 0 to 8%. The obtained films were characterized using glazing incident X-ray diffraction, scanning electron microscopy, high-resolution transmission electron microscopy, secondary ion mass spectrometer, and X-ray photoelectron spectroscopy. The optical absorptance and emittance at 100 °C were determined using UV–vis-NIR spectroscopy and Fourier transform infrared spectrometry, respectively. Effects of the material characteristics on the optical properties are reported and discussed.

► a-C:H/Cr coatings were prepared using reactive magnetron co-sputtering deposition.
► Cr exists as crystallites having diameters in between 1 to 2 nm.
► Coating prepared with 3% methane in the gas fed exhibits the best optical absorptance.