کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1666933 | 1518083 | 2012 | 4 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Carrier charging effect of V3Si nanocrystals floating gate memory structure Carrier charging effect of V3Si nanocrystals floating gate memory structure](/preview/png/1666933.png)
We fabricated V3Si nanocrystals embedded in SiO2 dielectric layer as a function of post- annealing conditions and characterized their charging effect to apply a nonvolatile memory device. The V3Si thin layer of 5-nm-thickness was deposited on the SiO2 tunneling layer by r.f. sputtering system. To create nanocrystals structure, the post-annealing process in N2 gas ambient by rapid thermal annealing method was done at temperature ranges from 600 °C to 1000 °C as a function of annealing times. After the post-annealing at 800 °C for 5 s, the spherical shaped V3Si nanocrystals with average diameter of 4 nm were formed. From the nano-floating gate capacitor structure with V3Si nanocrystals, the memory window was measured about 3.4 V when the sweeping voltages applied from − 9 V to 9 V and from 9 V to − 9 V. This result indicates that V3Si nanocrystals have a strong potential for the nonvolatile memory device.
Journal: Thin Solid Films - Volume 521, 30 October 2012, Pages 94–97