Thermodynamic study on co-deposition of ZrB2-SiC from ZrCl4-BCl3-CH3SiCl3-H2-Ar system

► The exact ratio of ZrB2 and SiC could be obtained by adjusting input gas ratios. ► The other condensed phase species could appear under some suitable conditions ► The H2 acting as reaction species directly influences the deposition process. ► The high H2 input amount is favorable for the co-deposition of ZrB2 and SiC. ► The flow rate range of the H2 pump should be increased in the experimental study.