Enhanced photoefficiency in positive-tone direct patterning of metal complexes for forming patterned indium tin oxide films

► Photoreaction of ortho-nitrobenzyl dioxybenzoate derivatives was investigated. ► Tuning the photolabile ester-indium tin complex increased film photoefficiency. ► A photoreaction of chelated maltol was also found to aid performance. ► Complexes coated once gave patterned 8.35 × 10− 4 Ω·cm indium tin oxide films.