کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1667172 | 1008844 | 2012 | 5 صفحه PDF | دانلود رایگان |
A possible route for the synthesis of Fe3O4, Fe, and Fe/Fe3O4 bi-layers with chemical vapor deposition by employing the same Fe3(CO)12 carbonyl precursor is presented. The comprehensive structural, chemical, and morphological investigation of the as-deposited thin single films and bi-layers is performed by X-ray diffraction, X-ray reflectivity, Raman spectroscopy, and time-of-flight secondary ion mass spectrometry depth profiling. We present the possibility of performing the deposition of pure metallic Fe and Fe3O4/γ-Fe2O3 by adjusting the deposition pressure from 10- 3/- 4 Pa to 1 Pa, respectively. The integration of Fe3O4 thin films in a magnetic tunnel junction stack fully synthesized by in situ atomic layer and chemical vapor deposition processes is also presented, showing good stack stability and marginal interdiffusion.
Journal: Thin Solid Films - Volume 520, Issue 14, 1 May 2012, Pages 4617–4621