Influence of lithium doping on the structural and electrical characteristics of ZnO thin films

► Preferentially c-axis oriented (Zn1 − xLix)O films were spin-coated on glass. ► (Zn1 − xLix)O thin films exhibit dense columnar microstructure. ► Low levels of lithium doping, increases the electrical resistivity of ZnO thin films. ► (Zn1 − xLix)O thin films show high values of transverse piezoelectric coefficient, e⁎31.