کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1667459 1008851 2012 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Nanostructure transition in Cr–C–N coatings deposited by pulsed closed field unbalanced magnetron sputtering
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Nanostructure transition in Cr–C–N coatings deposited by pulsed closed field unbalanced magnetron sputtering
چکیده انگلیسی

Cr–C–N coatings with different compositions, i.e. (C + N)/Cr atomic ratios (x) of 0.81–2.77, were deposited using pulsed closed field unbalanced magnetron sputtering by varying the chromium and graphite target powers, the pulse configuration and the ratio of the nitrogen flow rate to the total gas flow rate. Three kinds of nanostructures were identified in the Cr–C–N coatings dependent on the x values: a nano-columnar structure of hexagonal closed-packed (hcp) Cr2(C,N) and face-centered cubic (fcc) Cr(C,N) at x = 0.81 and 1.03 respectively, a nanocomposite structure consisting of nanocrystalline Cr(C,N) embedded in an amorphous C(N) matrix at x = 1.26 and 1.78, and a Cr-containing amorphous C(N) structure at x = 2.77. A maximum hardness of 31.0 GPa and a high H/E ratio of 1.0 have been achieved in the nc-Cr(C,N)/a-C(N) nanocomposite structure at x = 1.26, whereas the coating with a Cr-containing amorphous C(N) structure had a minimum hardness of 10.9 GPa and a low H/E ratio of 0.08 at x = 2.77. The incorporation of carbon into the Cr–N coatings led to a phase transition from hcp-Cr2(C,N) to fcc-Cr(C,N) by the dissolution into the nanocrystallites, and promoted the amorphization of Cr–C–N coatings with the precipitation of amorphous C(N). It was found that a high x value over 1.0 in the Cr–C–N coatings is the composition threshold to the nanostructure transition.


► Nanostructure transition of Cr–C–N coatings depended on (C + N)/Cr atomic ratio.
► A nano-columnar structure formed at atomic ratio less than 1.0.
► A nc-Cr(C,N)/a-C(N) nanocomposite structure formed at atomic ratio of 1.0–2.7.
► A Cr-containing amorphous C(N) structure formed at atomic ratio more than 2.7.
► Maximum hardness of 31.0 GPa was for nanocomposite coatings at atomic ratio of 1.26.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 520, Issue 13, 30 April 2012, Pages 4264–4269
نویسندگان
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