Microstructural differences between two Zr(C,N) coatings revealed by analytical transmission electron microscopy

► Electron microscopy cleared tribological differences of 2 Zr(C,N) coatings. ► Sample preparation by focused ion beam technique and an in-situ lift-out method. ► Long term stability of the sample with nano-multilayers and interface free of oxygen. ► Nano-multilayers are pairs with higher and lower Zr content and different width. ► Minority Zr3(C,N)4 phase concentrate in multilayer stripes of lower Zr content.