Crystallinity and electrical conductivity of sulfur-containing microcrystalline diamond thin film

► S concentration in diamond film was controlled from 2 × 1015 to 9 × 1017 cm− 3. ► H concentration was independent of the H2S/CH4 ratio and around 5 × 1020 cm− 3. ► Non-ohmic conduction was converted to ohmic when S = 9 × 1017 cm− 3.