Optimization of L10-FePt/MgO/CrRu thin films for next-generation magnetic recording media

L10-FePt thin films were deposited on silicon substrates with the structure of Si/CrRu/MgO/FePt. The magnetic and microstructural properties were optimized by varying the FePt sputter pressure and temperature, as well as the thicknesses of all three layers. High coercivity films greater than 1.8 T were grown when the FePt sputter pressure was at 1.33 Pa with a thickness of only 4 nm, on CrRu and MgO underlayers as thin as 10 nm and 2 nm, respectively.