کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1667935 | 1008860 | 2011 | 5 صفحه PDF | دانلود رایگان |
Tungsten-containing amorphous carbon films were produced by dual magnetron sputter deposition. The formation of carbide phases after heat treatment in inert gas at temperatures up to 2800 K was investigated by X-ray diffraction for tungsten concentrations below 25 at.%. After deposition, each film consists of an amorphous carbon matrix with atomically dispersed W inclusions. Annealing up to 2800 K leads to a formation of carbide phases and to nano clustering. Three tungsten carbide phases were observed (WC, W2C, and WC1 − x), mostly as mixtures of two phases. The phase combination depends on annealing temperature and W concentration. Additionally, nano diffraction was performed in a scanning transmission electron microscope, to determine the phase of single crystallites at scales, where X-ray diffraction fails.
Journal: Thin Solid Films - Volume 519, Issue 12, 1 April 2011, Pages 4049–4053