کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1668177 1008863 2011 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Generation of Si:H nanoparticles by a combination of pulse plasma and hydrogen gas pulses
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Generation of Si:H nanoparticles by a combination of pulse plasma and hydrogen gas pulses
چکیده انگلیسی

Si:H nanoparticles have been generated from 3 nm to 500 nm in count mean diameter (CMD) using a plasma chemical vapor deposition (CVD) system. In the present work, the nanoparticles are synthesized using cold plasma in order to get monodispersed size distribution with a combination of square wave modulated RF pulse plasma and a hydrogen gas pulse for better control of their size. The size of synthesized nanoparticles was measured by scanning mobility particle sizer (SMPS). The synthesis was carried out using pulse plasma with on-time of 1 s and off-time of 4 s. During 1 s on-time of plasma we added hydrogen gas pulses varying from 0.1 s to 0.9 s. Our results show that by utilizing dual pulse plasma and by controlling hydrogen gas pulse on-time we achieved smaller diameter Si nanoparticles. Hence, it is easier to generate smaller nanoparticles which generally have quantum effect and be utilized for various applications especially in solar cell application.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 519, Issue 20, 1 August 2011, Pages 7086–7089
نویسندگان
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