Development of smooth CuInGa precursor films for CuIn1 − xGaxSe2 thin film solar cell applications

CuInGa precursor thin films were deposited using a CuGa (75-25 at.%) and an In 3″ diameter target material simultaneously by RF magnetron sputtering. The precursor films were deposited on Si and glass substrates at − 80 °C and room temperature, and characterized by Rutherford backscattering spectroscopy, Auger electron spectroscopy, scanning electron microscopy, atomic force microscopy and X-ray diffraction. The effects of gun power density and substrate temperatures on resulting precursor film properties were investigated. Precursor films deposited at − 80 °C have a smooth morphology with a 75% reduction in all roughness values and are more dense and homogeneous in structure compared to precursors deposited at room temperature. Therefore these precursors will result in better selenization process reproducibility.