کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1668426 | 1008869 | 2011 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
In-situ inspection of cracking in atomic-layer-deposited barrier films on surface and in buried structures
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Thin inorganic barrier films deposited on plastics are essential to provide protection from moisture- and oxygen-aided degradation while maintaining a flexible substrate. Mechanical bending of the barrier films, causes stress-induced cracks that may lead to significant reduction or loss of barrier protection. In-situ characterization of film cracking on the nanoscale, transparent, and conformal atomic-layer-deposited (ALD) thin films is challenging especially when these films are in a buried layer structure. We developed a technique that can inspect in real-time the cracking of the stressed barrier films using laser scanning confocal microscopy. The in-situ inspection avoids the inaccurate measurement of the crack onset strain associated with the crack “close-up” phenomenon. SU8 cover-coat is applied to form a buried ALD layer structure and in-situ inspection demonstrates the cracking of the ALD film in real-time underneath the cover-coat. This technique is nondestructive, versatile, and allows rapid and large-area inspection of different types of barrier films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 520, Issue 1, 31 October 2011, Pages 251-257
Journal: Thin Solid Films - Volume 520, Issue 1, 31 October 2011, Pages 251-257
نویسندگان
Yadong Zhang, Ronggui Yang, Steven M. George, Yung-Cheng Lee,