کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1668617 1008872 2011 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
High-rate deposition by microwave RPECVD at atmospheric pressure
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
High-rate deposition by microwave RPECVD at atmospheric pressure
چکیده انگلیسی

The post-discharge of a microwave resonant cavity working at atmospheric pressure is used to enhance deposition of SiOx thin films from HMDSO by chemical vapor deposition. Maximum static deposition rates are close to 150 μm h− 1 for low power consumption per unit of coated width (~ 100 W/cm). Dynamic deposition rates are close to 3.5 nm m s− 1. The distribution of the coating thickness is heterogeneous over an area of 150 × 90 mm2. The influence of the main parameters of the process is systematically studied to show how the key reactions, i.e. gas phase synthesis of powders and surface deposition, are correlated.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 519, Issue 13, 29 April 2011, Pages 4177–4185
نویسندگان
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