کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1669106 1008879 2010 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Homoleptic single molecular precursors for the deposition of platinum and palladium chalcogenide thin films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Homoleptic single molecular precursors for the deposition of platinum and palladium chalcogenide thin films
چکیده انگلیسی

Platinum and palladium dithio/diselenoimidodiphosphinato complexes have been synthesized and used as single source precursors for the deposition of platinum and palladium chalcogenide thin films by the Low Pressure Chemical Vapour Deposition technique. Pure PtSe2 thin films were deposited at varying temperatures from the [Pt{N(SePiPr2)2}2] complex. However, only Pt films were obtained from the sulfur analogue. The palladium diselenoimidodiphosphinato complex gave palladium selenide films with different stochiometries depending on the growth temperature. The corresponding sulfur complex gave PdS2 films with a regular platelet-like morphology.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 519, Issue 1, 29 October 2010, Pages 197–202
نویسندگان
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