کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1669431 1008883 2010 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
The properties of low energy neutral particles in a neutral beam source: A molecular dynamics study
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
The properties of low energy neutral particles in a neutral beam source: A molecular dynamics study
چکیده انگلیسی
Application of a hyperthermal neutral beam source is one of the candidate methods of reducing plasma induced damage problems. The neutral beam is generated by vertical collisions between energetic ions and a reflector composed of metal. However, it is difficult to measure the neutral angle and energy distribution experimentally. We simulate the hyperthermal neutral beam (HNB) generation using a molecular dynamics algorithm. In order to obtain a low energy neutral beam, ions with various energies are vertically projected onto the reflector surface. A rough surface structure that has been experimentally measured is used for a realistic simulation. The energy distributions are obtained and the ratio of energy of reflected neutral particles agrees with experimental data.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 22, 1 September 2010, Pages 6408-6411
نویسندگان
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