کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1669432 | 1008883 | 2010 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effect of SF6 incorporation in the cyclic process on the low temperature deposition of carbon nanofilaments
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Effect of SF6 incorporation in the cyclic process on the low temperature deposition of carbon nanofilaments Effect of SF6 incorporation in the cyclic process on the low temperature deposition of carbon nanofilaments](/preview/png/1669432.png)
چکیده انگلیسی
To enhance the carbon nanofilaments (CNFs) formation density, SF6 was incorporated in the source gases (C2H2/H2) during the initial deposition stage. The source gases and SF6 were manipulated as the cyclic on/off modulation of C2H2/H2/SF6 flow in a thermal chemical vapor deposition system. The characteristics of the CNFs formation on the substrate were investigated according to the different cyclic modulation processes and the substrate temperatures. By the incorporation of SF6 in the cyclic process CNFs could be formed at the substrate temperature as low as 350 °C. Among the different processes, mutual alternating cyclic modulation process of C2H2 and SF6 could most highly enhance the CNFs formation density. The cause for the enhancement in the characteristics of as-grown CNFs by the incorporation of SF6 was discussed in association with the slightly enhanced etching ability by the incorporation of SF6.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 22, 1 September 2010, Pages 6412-6416
Journal: Thin Solid Films - Volume 518, Issue 22, 1 September 2010, Pages 6412-6416
نویسندگان
Kwang-Duk Kim, Sung-Hoon Kim, Soung Soo Yi, Kiwan Jang,