کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1669449 | 1008883 | 2010 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
X-Ray photoelectron spectroscopy analysis of plasma–polymer interactions for development of low-damage plasma processing of soft materials
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: X-Ray photoelectron spectroscopy analysis of plasma–polymer interactions for development of low-damage plasma processing of soft materials X-Ray photoelectron spectroscopy analysis of plasma–polymer interactions for development of low-damage plasma processing of soft materials](/preview/png/1669449.png)
چکیده انگلیسی
Plasma–polymer interactions have been investigated using atomic force microscopy (AFM) and x-ray photoelectron spectroscopy (XPS) of polyethyleneterephthalate (PET) films, which have been exposed to argon plasmas driven by low-inductance antenna modules as a parameter of ion energy. The AFM images indicated that the argon plasma exposure exhibited a significant change in surface roughness. The XPS analyses suggested that the degradation of chemical bonding structure and/or bond scission of PET could be effectively suppressed in the plasma exposures with ion energies below 6 eV. However, significant degradations of O = C–O bond, C–O bond and phenyl group were observed with increasing ion energy above 6 eV.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 22, 1 September 2010, Pages 6492–6495
Journal: Thin Solid Films - Volume 518, Issue 22, 1 September 2010, Pages 6492–6495
نویسندگان
Yuichi Setsuhara, Ken Cho, Masaharu Shiratani, Makoto Sekine, Masaru Hori,