کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1669527 1008884 2011 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Laterally organized carbon nanotube arrays based on hot-filament chemical vapor deposition
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Laterally organized carbon nanotube arrays based on hot-filament chemical vapor deposition
چکیده انگلیسی

Lateral porous anodic alumina (PAA) templates were used to organize carbon nanotubes (CNTs) grown by a hot-filament assisted chemical vapor deposition (HFCVD) process. For the CNT growth, we used a modified “home-made” HFCVD system with two independently powered filaments which are fitted respectively on the methane (CH4) gas line, which serves as a carbon precursor and on the hydrogen (H2) gas line, which acts as an etching agent for the parasitic amorphous carbon. Various activation powers of the hot filaments were used to directly or indirectly decompose the gas mixtures at relatively low substrate temperatures. A parametric study of the HFCVD process has been carried out for optimizing the confined CNTs growth inside the lateral PAA templates.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 519, Issue 14, 2 May 2011, Pages 4598–4602
نویسندگان
, , , , ,