کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1670090 1008895 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Rotating polarizer-analyzer scanning ellipsometer
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Rotating polarizer-analyzer scanning ellipsometer
چکیده انگلیسی

A spectroscopic ellipsometer in which the polarizer and the analyzer are rotating synchronously in opposite directions at the same speed is proposed. The light intensity involves four components, one dc and three cosine terms, with frequencies of ω, 2ω, and 3ω. The main advantage of the proposed ellipsometer is that: it is feasible to extract the ellipsometric parameters ψ and Δ from the even Fourier coefficients without relying on the dc component which is considered to be a serious problem in rotating-analyzer or -polarizer ellipsometer. This allows measurements in semi-dark room without worrying about stray light problems, dark currents in detectors, and long term fluctuations in light sources. The calculations of the optical parameters of c-Si, Au, and GaAs are in excellent agreement with the published data.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 19, 30 July 2010, Pages 5610–5614
نویسندگان
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