کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1670166 1008896 2008 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Tribological and mechanical properties of physical vapor deposited alpha alumina thin film coating
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Tribological and mechanical properties of physical vapor deposited alpha alumina thin film coating
چکیده انگلیسی

Alpha alumina thin film coatings were deposited by Alternating Current inverted magnetron sputtering technique. 1 micron thick coatings were deposited on silicon at 3 different power levels (4, 5 and 6 kW) and 3 different oxygen partial pressure ratios (40, 50 and 60% by volume) for studying the tribological properties such as adhesion, hardness, wear resistance, coefficient of friction, and wear rate. Maximum critical load of 30 N was obtained by scratch test. Hardness was measured as 20 GPa. The coating with 5 kW and 50% oxygen partial pressure ratio showed the best wear resistance and coefficient of friction properties. The wear behavior of alpha alumina at different sliding distance was studied.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 517, Issue 2, 28 November 2008, Pages 819–823
نویسندگان
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