Properties of (K,Na)NbO3-based lead-free piezoelectric films prepared by pulsed laser deposition

To investigate the properties of (K,Na)NbO3-based lead-free piezoelectric films at the morphotropic phase boundary composition, we fabricated epitaxial [(K0.5Na0.5)0.97Li0.03] (Nb0.8Ta0.2)O3 films on (001), (110) and (111)-oriented single crystal SrTiO3 substrates by pulsed laser deposition. The structure and electrical properties of the films were studied. Dielectric constants of 540, 390 and 300 and remnant polarizations of 4.00, 1.05, and 0.35 μC/cm2 were observed for the (001), (110) and (111) oriented films, respectively.