کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1670840 | 1008905 | 2010 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
The deposition mechanism of atmospheric pressure glow plasma polymerized hexafluoropropene: Gas phase analysis of HFP plasma
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The relationship between the plasma conditions and the atmospheric pressure glow plasma deposition characteristics of the polyhexafluoropropene film, such as the film configuration, the deposition rate and products in plasma, was investigated. The higher deposition rate and the higher monomer use efficiency were obtained at a lower hexafluoropropene (monomer) concentration and a lower total gas flow rate (longer residence time in the plasma region). However, an extreme long residence time generated some granular deposits. And five gas phase products were detected by gas phase analysis. We considered that C2F4 and C4H8, which have double bond, were related to the deposition deeply.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 13, 30 April 2010, Pages 3566–3569
Journal: Thin Solid Films - Volume 518, Issue 13, 30 April 2010, Pages 3566–3569
نویسندگان
Ren Ozaki, Masuhiro Kogoma, Kunihito Tanaka,