کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1670958 1008907 2010 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Nanocrystalline diamond film as cathode for gas discharge sensors
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Nanocrystalline diamond film as cathode for gas discharge sensors
چکیده انگلیسی

Nanocrystalline diamond (NCD) film was deposited on a silicon substrate utilizing microwave plasma-enhanced chemical vapor deposition in a mixed flow of methane, hydrogen and argon. The deposited film had a cauliflower-like morphology, and was composed of NCD, carbon clusters and mixed sp2- and sp3-bonded carbon. Electron field emission (EFE) in vacuum and electrical discharges in Ar, N2 and O2 using the NCD film as the cathode were characterized. The turn-on field for EFE and the geometric enhancement factor for the NCD film were 8.5 V/μm and 668, respectively. The breakdown voltages for Ar, N2 and O2 increased with pressures from 1.33 × 104 Pa to 1.01 × 105 Pa, following the right side of the normal Paschen curve.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 15, 31 May 2010, Pages 4458–4461
نویسندگان
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