کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1671031 | 1008909 | 2009 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effect of gas composition on metal surface cleaning using atmospheric pressure microwave plasma
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Effect of gas composition on metal surface cleaning using atmospheric pressure microwave plasma Effect of gas composition on metal surface cleaning using atmospheric pressure microwave plasma](/preview/png/1671031.png)
چکیده انگلیسی
A microwave excited atmospheric pressure plasma source was manufactured and a cleaning experiment involving a stainless steel plate contaminated with organic oil was conducted, while considering the radical density in the Ar, Ar–O2, and Ar–H2O plasma. The most notable cleaning effect was confirmed when the plasma contained water molecules. While the existence of a unique spatial distribution of OH radical was demonstrated, the relevance of the cleaning effect and radical density was confirmed. The radical density distribution was examined by numerical computation using the experimentally obtained plasma parameter.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 3, 1 December 2009, Pages 981–986
Journal: Thin Solid Films - Volume 518, Issue 3, 1 December 2009, Pages 981–986
نویسندگان
Shigeru Ono, Shinriki Teii, Yuta Suzuki, Takuya Suganuma,