کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1671059 | 1008910 | 2010 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Al-doped ZnO (AZO) films deposited by reactive sputtering with unipolar-pulsing and plasma-emission control systems
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Al-doped ZnO (AZO) films deposited by reactive sputtering with unipolar-pulsing and plasma-emission control systems Al-doped ZnO (AZO) films deposited by reactive sputtering with unipolar-pulsing and plasma-emission control systems](/preview/png/1671059.png)
چکیده انگلیسی
Al-doped ZnO (AZO) films were deposited on fused silica glass substrates unheated or heated at 200 °C by reactive dc sputtering using a Zn–Al alloy target with mid-frequency pulsing (50 kHz) and the plasma control unit with a feedback system of the optical emission intensity of the atomic O* line at 777 nm to control oxygen gas flow. The stable and reproducible depositions were successfully carried out in the transition region. The deposition rates attained in this study were about 10–20 times higher than the one by conventional sputtering using oxide targets. The AZO films with the lowest resistivity of 3.8 × 10− 4 Ω cm was deposited on the substrate heated at 200 °C with a sputter power of 4 kW, where the deposition rate was 385 nm/min.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 518, Issue 11, 31 March 2010, Pages 2980–2983
Journal: Thin Solid Films - Volume 518, Issue 11, 31 March 2010, Pages 2980–2983
نویسندگان
Kento Hirohata, Yasutaka Nishi, Naoki Tsukamoto, Nobuto Oka, Yasushi Sato, Isao Yamamoto, Yuzo Shigesato,