کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1671583 1008920 2007 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication and characterization of microcantilever integrated with PZT thin film sensor and actuator
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Fabrication and characterization of microcantilever integrated with PZT thin film sensor and actuator
چکیده انگلیسی

The purpose is to find the potential application of PZT thin film for microsensor and microactuator. Pb(Zr0.5Ti0.5)O3 thin film is deposited by sol–gel method. Piezoelectric microcantilever with two-segment top electrodes is fabricated using bulk micromachining techniques. Piezoelectricity of the deposited PZT thin film and sensing and actuation capability of the each segment of microcantilever is proved. Experiments are performed when one segment acts as an actuator or vibrator and another segment as force sensor. The results show that the proposed PZT thin film microcantilever can be used in force feedback and object manipulation simultaneously.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 515, Issue 24, 15 October 2007, Pages 8544–8548
نویسندگان
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