کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1671703 | 1008922 | 2008 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effect of substrate temperature on structural, electrical and optical properties of Ga-doped ZnO films on cycro olefin polymer substrate by ion plating deposition
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The dependences of the structural, electrical and optical properties of transparent conductive Ga-doped ZnO (GZO) films with a thickness of 100 nm on the unheated cyclo olefin polymer (COP) and alkali-free glass substrate temperatures has been studied. GZO films were prepared on substrates by ion plating deposition with direct-current arc discharge. The substrate temperature rises with longer plasma exposure time. By controlling the time of exposure to plasma such that the substrate temperature does not exceed 100 °C, highly transparent conductive GZO with the resistivity of less than 7 × 10− 4 Ω cm on COP and glass substrates can be obtained.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 517, Issue 3, 1 December 2008, Pages 1037–1041
Journal: Thin Solid Films - Volume 517, Issue 3, 1 December 2008, Pages 1037–1041
نویسندگان
Aki Miyake, Takahiro Yamada, Hisao Makino, Naoki Yamamoto, Tetsuya Yamamoto,