کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1672347 | 1518086 | 2007 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films](/preview/png/1672347.png)
چکیده انگلیسی
We report a large piezoresistive effect of the plasma assisted chemical vapor deposited hydrogenated amorphous carbon (a-C:H) films deposited at bias voltages of − 350 and − 800 V. The gauge factors were measured in transversal, longitudinal strain configurations and lateral, vertical current flow directions with respect to the layer surface. The gauge factor measurements were performed in the temperature range of 23–60 °C. A model is proposed to explain the origin of piezoresistive effect in the a-C:H films. From the experimental results we suggest the parameters which can further enhance the gauge factor values in the films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 515, Issues 20–21, 31 July 2007, Pages 8028–8033
Journal: Thin Solid Films - Volume 515, Issues 20–21, 31 July 2007, Pages 8028–8033
نویسندگان
A. Tibrewala, E. Peiner, R. Bandorf, S. Biehl, H. Lüthje,