Development of 3d micro–nano hybrid patterns using anodized aluminum and micro-indentation

We developed a simple and cost-effective method of fabricating 3D micro–nano hybrid patterns in which micro-indentation is applied on the anodized aluminum substrate. Nano-patterns were formed first on the aluminum substrate, and then micro-patterns were fabricated by deforming the nano-patterned aluminum substrate. Hemispherical nano-patterns with a 150 nm-diameter on an aluminum substrate were fabricated by anodizing and alumina removing process. Then, micro-pyramid patterns with a side-length of 50 μm were formed on the nano-patterns using micro-indentation. To verify 3D micro–nano hybrid patterns, we replicated 3D micro–nano hybrid patterns by a hot-embossing process. 3D micro–nano hybrid patterns may be used in nano-photonic devices and nano-biochips applications.