کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1672522 1008934 2009 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fluorescent tags to visualize defects in Al2O3 thin films grown using atomic layer deposition
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Fluorescent tags to visualize defects in Al2O3 thin films grown using atomic layer deposition
چکیده انگلیسی

Defects and cracks in thin film barriers that are coated on polymers allow the leakage of reactive species through the polymer substrate. Fluorescent tags have been developed to visualize defects and cracks in thin film barriers and to inspect rapidly the barrier quality with minimal sample preparation. For Al2O3 films with a thickness of 25 nm deposited on polyethylene naphthalate polymer substrates using atomic layer deposition techniques, the fluorescent tags have identified cracks ~ 20 nm in width after applied strain and have observed individual defects as small as ~ 200 nm in diameter.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 517, Issue 24, 30 October 2009, Pages 6794–6797
نویسندگان
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